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   유틸리티 > 수학/화학/공학용 > PANELMAP 1.x for Windows
 
 
 
이전상품 PANELMAP 1.x for Windows 다음상품
 
 
 
제조회사 : Boin GmbH
판매가격 : 1,980,000원 (VAT 포함)
공급방식 : ESD
수량 EA
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ADVANCED: Includes all graphics, "Compare", "Operations", and "SPC"


PROFESSIONAL: Includes all graphics, "Compare", "Operations", "SPC", "Import", and "Export"



PANELMAP is a software package used to collect, edit, analyze and visualize measured physical parameters on rectangular semiconductor panels. PANELMAP can import data files from various metrology tools such as ellipsometers, thickness gauges and four point probes. The imported data can then be visualized or printed as line scans, contour plots, 2D or 3D plots or as a histogram.


Several kinds of operations can be applied to the panel maps such as shifting of the grid in the X or Y direction, rotation, or mirroring the data along the X or Y axis. Global operations such as adding or subtracting a constant or taking the 1st or 2nd derivative can be carried out.


A Sigma Filter allows for the elimination of sites that exceed a user-defined range (e.g. measurement errors). It is also possible to compare different sets of data by adding, subtracting or dividing entire panel maps. Typical applications include map generation for manually operated metrology tools and standardized visualization for different automatic metrology equipment (e.g. different types of four point probes in the same fab). PANELMAP allows users to work off-line and to analyze and edit metrology data outside of the clean room. It’s the perfect solution for paperless fabs.






Features



General
  • Advanced xml-based Boin multi-column multi-panel file format
  • Loading of multiple columns and panels at once
  • Configurable 1D- (line scan), 2D- (contour or colored), 3D- (solid or wire frame), 3D bar chart-, value-, and sigma range plots
  • Multicolor contour plot
  • Statistical analysis (histogram, calculation of mean, standard deviation, max, min, etc.)
  • Import functions for data from different metrology tools (AIT CMT 5000, E+H, Filmetrics, GP-Solar, OMT)
  • Import of data from metrology tools that directly write the PANELMAP file format (E+H, ISIS Optronics)
  • Other import functions (e.g. ASCII files)
  • Export of *.jpg and *.bmp files
  • Export into *.html file format
  • Definition of any site pattern using a graphic editor
  • Automatic generation of Cartesian or circular site patterns
  • Extensive on-line help and HTML based user manual
SPC
  • Trend charts
  • Trend lists
  • X-Y-plots of statistical values
  • Global statistics ("All points, all panels")
  • Browser
  • Trend charts and lists can be sorted by any criterion (date & time, mean, max, min, std. dev. etc.)
  • Stacked maps
  • Operations with files
  • Direct import of measurement files into the SPC tool
Operations
  • Global operations (add, subtract, divide, square, square root, etc.)
  • 1st and 2nd derivative of a map
  • File compare operations (add, multiply, ratio, average, etc.)
  • File operations are applicable to files with different site distributions
  • Shift (X and Y direction) and rotation of grids
  • Mirroring of maps along the X and Y axis
  • Multiple files can be open simultaneously
  • Multiple views of a single file can be selected and displayed simultaneously
  • Multiple views can be printed on a single sheet, printouts are configurable including company logo
  • Transformation of grids (Cartesian, circular) keeping same measurement feature
  • Merge data of different files (e.g. two measurements of one panel)
  • Sigma Sorting Filter (1, 2, 3 sigma)
  • Interpolation of sites
Communication / Linking
  • Inter-application communication via DCOM (ActiveX server)
  • Advanced control of PANELMAP can be achieved via DDE linking to another application (availability depending on OS)