ADVANCED: Includes all graphics, "Compare", "Operations", and "SPC"
PROFESSIONAL: Includes all graphics, "Compare", "Operations", "SPC", "Import", and "Export"
PANELMAPis a software package used to collect, edit, analyze and visualize measured physical parameters on rectangular semiconductor panels. PANELMAP can import data files from various metrology tools such as ellipsometers, thickness gauges and four point probes. The imported data can then be visualized or printed as line scans, contour plots, 2D or 3D plots or as a histogram.
Several kinds of operations can be applied to the panel maps such as shifting of the grid in the X or Y direction, rotation, or mirroring the data along the X or Y axis. Global operations such as adding or subtracting a constant or taking the 1st or 2nd derivative can be carried out.
A Sigma Filter allows for the elimination of sites that exceed a user-defined range (e.g. measurement errors). It is also possible to compare different sets of data by adding, subtracting or dividing entire panel maps. Typical applications include map generation for manually operated metrology tools and standardized visualization for different automatic metrology equipment (e.g. different types of four point probes in the same fab). PANELMAP allows users to work off-line and to analyze and edit metrology data outside of the clean room. It¡¯s the perfect solution for paperless fabs.
Features
General
Advanced xml-based Boin multi-column multi-panel file format
Loading of multiple columns and panels at once
Configurable 1D- (line scan), 2D- (contour or colored), 3D- (solid or wire frame), 3D bar chart-, value-, and sigma range plots
Multicolor contour plot
Statistical analysis (histogram, calculation of mean, standard deviation, max, min, etc.)
Import functions for data from different metrology tools (AIT CMT 5000, E+H, Filmetrics, GP-Solar, OMT)
Import of data from metrology tools that directly write the PANELMAP file format (E+H, ISIS Optronics)
Other import functions (e.g. ASCII files)
Export of *.jpg and *.bmp files
Export into *.html file format
Definition of any site pattern using a graphic editor
Automatic generation of Cartesian or circular site patterns
Extensive on-line help and HTML based user manual
SPC
Trend charts
Trend lists
X-Y-plots of statistical values
Global statistics ("All points, all panels")
Browser
Trend charts and lists can be sorted by any criterion (date & time, mean, max, min, std. dev. etc.)
Stacked maps
Operations with files
Direct import of measurement files into the SPC tool
Operations
Global operations (add, subtract, divide, square, square root, etc.)