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ADVANCED: Includes all graphics, "Compare", "Operations", and "SPC"
PROFESSIONAL: Includes all graphics, "Compare", "Operations", "SPC", "Import", and "Export"
WAFERMAP is an award winning software package used to collect, edit, analyze and visualize measured physical parameters on semiconductor wafers. WAFERMAP can import data files from various metrology tools.
WAFERMAP is an award winning software package used to collect, edit, analyze and visualize measured physical parameters on semiconductor wafers. WAFERMAP can import data files from various metrology tools such as ellipsometers, thickness gauges and four point probes. The imported data can then be visualized or printed as line scans, contour plots, 2D or 3D plots or as a histogram.
Several kinds of operations can be applied to the wafer maps such as rotation, shifting of the grid in the X or Y direction, or mirroring the data along the X or Y axis. Global operations such as adding or subtracting a constant or taking the 1st or 2nd derivative can be carried out.
A Sigma Filter allows for the elimination of sites that exceed a user-defined range (e.g. measurement errors). It is also possible to compare different sets of data by adding, subtracting or dividing entire wafer maps. Typical applications include map generation for manually operated metrology tools and standardized visualization for different automatic metrology equipment (e.g. different types of four point probes in the same fab). WAFERMAP allows users to work off-line and to analyze and edit metrology data outside of the clean room. It's the perfect solution for paperless fabs.
Features
General- Advanced xml-based Boin multi-column multi-wafer file format
- Loading of multiple columns and wafers at once
- Configurable 1D- (line scan), 2D- (contour or colored), and value plots
- Configurable 3D- (solid or wire frame), 3D bar chart, and sigma range plots
- Statistical analysis (histogram, calculation of mean, standard deviation, max, min, etc.)
- Import functions for data from metrology tools (e.g. 4 Dimensions, AIT CMT 5000, AMS SRD/MRD, Bruker AXS, CDE ResMap, FILMetrics, HRP-250, KLA Tencor RS 100, KLA Tencor F5 Ellipsometer, Nanophotonics, NanoSpec/AFT, Napson WS300, Nicolet, Nova 2040, OMS 3000, OMT, Plasmos, Prometrix RS, Prometrix UV-1250, QC Solutions SCP 7000, Rigaku 310Fab, Rigaku MFM, Rudolph, Rudolph Metapulse, Semitek, Sentech SE-400 and SE-800, SOPRA SE, SpectraFilm F1, Thermawave Optiprobe and Thermaprobe, TWIN)
- Import of data from metrology tools which directly write WAFERMAP format (e.g. E & H, Foothill, Hypernex, ISIS Optronics, Jenoptik, Jobin Yvon, Sigmatech, Tepla)
- Other import functions (e.g. ASCII files, OPUS)
- Definition of any site pattern using a graphic editor
- Automatic generation of circular or Cartesian site patterns for any test diameter
- Extensive on-line help and HTML based user manual
SPC- Trend charts
- Trend lists
- Global Statistics ("All points, all wafers")
- Browser
- Trend charts and lists can be sorted by any criterion (date & time, mean, max, min, std.dev. etc.)
- Calculation of Stacked Maps
- Operations with files
- Direct import of measurement files into the SPC tool
Operations- Global operations (add, subtract, divide, square, square root, etc.)
- 1st and 2nd derivative of a map
- File compare operations (add, multiply, ratio, average etc.)
- File operations are applicable to files with different site distributions
- Shift (X and Y direction) and rotation of grids
- Mirroring of maps along the X and Y axis
- Averaging of radial zones
- Multiple files can be open simultaneously
- Multiple views of a single file can be selected and displayed simultaneously
- Multiple views can be printed on a single sheet, printouts are configurable including company logo
- Transformation of grids (Cartesian, circular) keeping same measurement feature
- Merge data of different files (e.g. two measurements of one wafer)
- Sigma Sorting Filter (1, 2, 3 sigma)
- Interpolation of sites
Communication / Linking- Inter-application communication via DCOM (ActiveX server)
- Advanced control of WAFERMAP can be achieved via DDE linking to another application (availability depending on OS)
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